Table des matières
Nanofabrication : Equipments
Lithography Tools:
MJB4 mask aligner
MJB3 mask aligner
µpg101 laser lithography
Zeiss Supra 40 + Raith Elphy plus (EBL)
Thin film depostion Tools:
MEB550S ebeam Evaporator
MEB300 Thermal Evaporator
EVA300 RF Sputtering
Etching Tools:
RIE-ICP plasmalab 80 plus
IBE-SIMS Elletrovara